Browsing by Author "Williford, Clint W."
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Item A Bellows-Shape Electrostatic Microactuator(1999-02) Williford, Clint W.; Li, Z.; Wang, Z.; Bricka, Mark R.; Bahemuka, T. E.; Mubofu, Egid B.; Minami, Kazuyuki; Morishita, H.; Esashi, Masayoshi