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College of Natural and Applied Sciences
Chemistry Department
A Bellows-Shape Electrostatic Microactuator
A Bellows-Shape Electrostatic Microactuator
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ABSTRACT.pdf
2.86 KB
Date
1999-02
Authors
Williford, Clint W.
Li, Z.
Wang, Z.
Bricka, Mark R.
Bahemuka, T. E.
Mubofu, Egid B.
Minami, Kazuyuki
Morishita, H.
Esashi, Masayoshi
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http://hdl.handle.net/20.500.11810/2498
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