A Bellows-Shape Electrostatic Microactuator

Simple item page
dc.contributor.authorWilliford, Clint W.
dc.contributor.authorLi, Z.
dc.contributor.authorWang, Z.
dc.contributor.authorBricka, Mark R.
dc.contributor.authorBahemuka, T. E.
dc.contributor.authorMubofu, Egid B.
dc.contributor.authorMinami, Kazuyuki
dc.contributor.authorMorishita, H.
dc.contributor.authorEsashi, Masayoshi
dc.date.accessioned2016-06-15T20:55:19Z
dc.date.available2016-06-15T20:55:19Z
dc.date.issued1999-02
dc.identifier.urihttp://hdl.handle.net/20.500.11810/2498
dc.language.isoenen_US
dc.titleA Bellows-Shape Electrostatic Microactuatoren_US
dc.typeJournal Articleen_US
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
ABSTRACT.pdf
Size:
2.86 KB
Format:
Adobe Portable Document Format
Description:
Abstract
Download
License bundle
Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.71 KB
Format:
Item-specific license agreed upon to submission
Description:
Download
Collections
Chemistry Department