Williford, Clint W.Li, Z.Wang, Z.Bricka, Mark R.Bahemuka, T. E.Mubofu, Egid B.Minami, KazuyukiMorishita, H.Esashi, Masayoshi2016-06-152016-06-151999-02http://hdl.handle.net/20.500.11810/2498enA Bellows-Shape Electrostatic MicroactuatorJournal Article